| 基于La0.7Sr0.3FeO3的微结构乙醇气体传感器的研制 |
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| 引用本文： | 刘丽,张彤,漆奇,陈维友,徐宝琨.基于La0.7Sr0.3FeO3的微结构乙醇气体传感器的研制[J].半导体学报,2007,28(4):610-613. |
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| 作者姓名： | 刘丽 张彤 漆奇 陈维友 徐宝琨 |
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| 作者单位： | 吉林大学电子科学与工程学院，长春 130012;吉林大学物理学院朝阳校区物理中心，长春 130012;吉林大学电子科学与工程学院，长春 130012;吉林大学电子科学与工程学院，长春 130012;吉林大学电子科学与工程学院，长春 130012;吉林大学电子科学与工程学院，长春 130012 |
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| 摘 要： | 以La0.7Sr0.3FeO3为敏感材料，设计制成了一种新型的共平面结构气体传感器.基于有限元分析软件Ansys对该传感器结构进行了优化设计.实验测得该传感器对于500ppm浓度乙醇气体的灵敏度为8.0，功耗为261mW，是同种敏感材料烧结型传感器功耗的2/3，响应时间约为1.5s，恢复时间约为2.5s，是一种功耗低、灵敏度高、稳定性好的微结构乙醇气体传感器.
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| 关 键 词： | La0.7Sr0.3FeO3 纳米材料 微结构 低功耗 乙醇 气体传感器 |
| 文章编号： | 0253-4177(2007)04-0610-04 |
| 修稿时间： | 09 25 2006 12:00AM |
Study of Micro-Structure Ethanol Gas Sensor Based on La0.7Sr0.3FeO3 |
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| Liu Li , Zhang Tong, Qi Qi , Chen Weiyou , and Xu Baokun.Study of Micro-Structure Ethanol Gas Sensor Based on La0.7Sr0.3FeO3[J].Chinese Journal of Semiconductors,2007,28(4):610-613. |
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| Authors: | Liu Li Zhang Tong Qi Qi Chen Weiyou and Xu Baokun |
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| Institution: | College of Electronic Science and Engineering, Jilin University, Changchun 130026, China;College of Physics, Jilin University, Changchun 130012, China;College of Electronic Science and Engineering, Jilin University, Changchun 130026, China;College of Electronic Science and Engineering, Jilin University, Changchun 130026, China;College of Electronic Science and Engineering, Jilin University, Changchun 130026, China;College of Electronic Science and Engineering, Jilin University, Changchun 130026, China |
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| Abstract: | This paper presents a novel micro-structure ethanol gas sensor.The heater electrodes and signal electrodes were designed on the same plane in order to reduce cross-talk and make the fabrication easier.The whole design has been simulated using a 3D electro-thermo-mechanical finite element model through Ansys.The nano complex oxide La0.7Sr0.3FeO3 is employed to act as sensitive material coated on the surface of the substrate. Experimental results show that the sensitivity of this novel sensor is 8.0 when the concentration of the ethanol is 500ppm, the power consumption is approximately two thirds of that of commercial sintering gas sensors, the response time is about 1.5s, and the recovery time is about 2.5s. |
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| Keywords: | La0 7Sr0 3FeO3 nano material micro-structure low power consumption ethanol gas sensor |
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