| 硅表面复合自组装膜的制备及其摩擦性能 |
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| 引用本文： | 潘鹤,滕淑华,丁翠翠. 硅表面复合自组装膜的制备及其摩擦性能[J]. 物理化学学报, 2012, 28(4): 917-922. DOI: 10.3866/PKU.WHXB201201172 |
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| 作者姓名： | 潘鹤 滕淑华 丁翠翠 |
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| 作者单位： | School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu Province, P. R. China |
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| 基金项目： | 国家重点基础研究发展计划项目(973)(2007CB607605);中央高校基本科研业务费专项资金(2011QNA06)资助~~ |
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| 摘 要： | 采用自组装技术在单晶硅表面制备了3-氨基丙基三乙氧基硅烷(APTES)-SiO2-APTES复合膜,并对其表面的组成、结构及摩擦性能进行了表征.结果表明:复合膜表面对水的接触角约为63°,且表面平整、致密,其平均粗糙度(Ra)约为0.963nm.通过原子力显微镜(AFM)和透射电子显微镜(TEM)观察到夹层中SiO2颗粒的粒径约为20-50nm,较均匀地分布在第一层APTES膜的表面.与APTES自组装单层膜(SAMs)相比,APTES-SiO2-APTES复合膜由于纳米SiO2颗粒的引入而表现出更低的摩擦系数和更长的耐磨寿命.
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| 关 键 词： | 单晶硅 自组装 复合膜 摩擦性能 |
| 收稿时间： | 2011-09-26 |
| 修稿时间： | 2012-01-17 |
Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface |
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| PAN He , TENG Shu-Hua , DING Cui-Cui. Preparation and Tribological Properties of Self-Assembled Composite Films on Silicon Surface[J]. Acta Physico-Chimica Sinica, 2012, 28(4): 917-922. DOI: 10.3866/PKU.WHXB201201172 |
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| Authors: | PAN He TENG Shu-Hua DING Cui-Cui |
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| Affiliation: | School of Materials Science and Engineering, China University of Mining and Technology, Xuzhou 221116, Jiangsu Province, P. R. China |
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| Abstract: | Composite films of 3-aminopropyltriethoxysilane(APTES)-SiO 2 -APTES were prepared on single-crystal silicon substrates using a self-assembly technique,and then their composition,structure,and tribological properties were characterized.The results showed that the composite films had a uniform and dense surface with an average roughness(R a )of 0.963 nm and a contact angle of 63°.The atomic force microscopy(AFM)and transmission electron microscopy(TEM)observations revealed that,in the middle layer of the composite film,silica particles of 20-50 nm in diameter were uniformly deposited on the APTES layer.Compared to the APTES self-assembled monolayers(SAMs),the APTES-SiO 2 -APTES composite films exhibited a smaller friction coefficient and a longer wear life due to the introduction of the silica nano-particles. |
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| Keywords: | Single-crystal silicon Self-assembly Composite film Tribological property |
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