Determination of low dose concentration profiles in solids by means of (n,p) and (n, α) reactions

The isotopes³He,⁶Li,⁷Be and¹⁰B exhibit extremely large cross sections, between 1 and 48 kilobarn, for (n, p) or (n, α) reactions with thermal neutrons. Together with now available extracted thermal neutron fluxes of 10⁽ n·cm⁻²·sec⁻¹ or more, these reactions present a highly sensitive method of detecting the mentioned light elements in any heavy matrix material. Through the experimentally determined energy losses of the emitted protons or α-particles, also well resolved depth profiles can be obtained, as demonstrated here for some relevant examples from semiconductor and fusion technology.