| 一种优化的微测热辐射计热学参数性能测试分析方法 |
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| 引用本文： | 刘子骥,吕坚,郑兴,蒋亚东,王涛.一种优化的微测热辐射计热学参数性能测试分析方法[J].红外与毫米波学报,2012,31(2):183-187. |
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| 作者姓名： | 刘子骥 吕坚 郑兴 蒋亚东 王涛 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室,四川成都,610054 |
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| 基金项目： | 国家自然科学基金项目(60806021) |
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| 摘 要： | 优化的微测热辐射计热学参数的测试方法，与传统测试方法相比，能够实现热导和响应时间的精确测量，克服热学参数评估依赖仿真的缺陷,且该方法易于实现，工程应用性强.通过对研制的微测热辐射计性能进行相应的测试，确定了该测试方法准确、可靠.
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| 关 键 词： | 微测热辐射计，测试，热导，热容 |
| 收稿时间： | 4/6/2011 12:00:00 AM |
| 修稿时间： | 2011/12/12 0:00:00 |
An improved test and analyze method for microbolometer thermal performances |
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| LIU Zi-Ji,LV Jian,ZHENG Xing,JIANG Ya-Dong and WANG Tao.An improved test and analyze method for microbolometer thermal performances[J].Journal of Infrared and Millimeter Waves,2012,31(2):183-187. |
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| Authors: | LIU Zi-Ji LV Jian ZHENG Xing JIANG Ya-Dong and WANG Tao |
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| Institution: | State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,University of Electronic Science and Technology of China,State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China,University of Electronic Science and Technology of China and University of Electronic Science and Technology of China |
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| Abstract: | An improved test method was introduced. Compared with the traditional one, it could be more precision and impersonal. Nevertheless it is easy to implement and anti-influence of fabricated process. Through the test process with the microbolometers fabricated, this test method is reliable and precision. |
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| Keywords: | microbolometer test thermal conductance thermal capacitance |
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