Suppression of chaos in a MEMS resonator by delayed position feedback

A delayed position feedback control is applied on DC voltage source for suppressing chaos of a typical MEMS resonator actuated by electrostatic forces. A theoretical necessary condition for chaotic oscillation of the controlled system is presented. Numerical results and the analytical prediction reveal the evolution of dynamical behavior of the system with AC voltage amplitude and the control effect of delayed feedback on reducing chaos of the system. It shows that the delayed feedback control is effective on suppressing chaos of the micro mechanical resonator.