Abstract: | A Monte‐Carlo simulation written in C++ has been developed to describe spatial distributions of energy dissipation and x‐rays generated by penetrating kilovolt electrons in a multi‐film target. To evaluate the x‐ray source, especially its size and intensity, the use of brightness is proposed as a figure of merit. The Monte‐Carlo simulation approach was applied to a W (5 µm)/Al (200 µm) film target, which has been in practical use as an x‐ray source of small size with high emissivity. The result demonstrates that the experiment had considerable success. The optimum operating condition for the W (5 µm)/Al (200 µm) target in practical use has also been proposed by considering temperature elevation, spot size of electron beam, x‐ray source size and x‐ray intensity. Copyright © 2005 John Wiley & Sons, Ltd. |