Summary of ISO/TC 201 standard: XV. ISO 20341:2003—Surface chemical analysis—secondary ion mass spectrometry—method for estimating depth resolution parameters with multiple delta‐layer reference materials

This International Standard specifies procedures for estimating three depth resolution parameters, via the leading‐edge decay length, the trailing‐edge decay length and Gaussian broadening, in SIMS depth profiling using multiple delta‐layer reference materials. This International Standard is not applicable to delta‐layers where the chemical and physical state of the near‐surface region, modified by the incident primary ions, is not in the steady state. Copyright © 2005 John Wiley & Sons, Ltd.