Electron probe microanalysis (EPMA) measurement of aluminum oxide film thickness in the nanometer range on aluminum sheets

By using Monte Carlo simulation, the thickness of an aluminum oxide film in the nanometer range on aluminum sheets given different heat treatments was determined by electron probe microanalysis (EPMA) and compared with transmission electron microscopy (TEM). The film thickness was ≤50 nm. As a result, although the same analysis areas were not measured, similar deviations between EPMA and TEM were found. Consequently, we found that the Monte Carlo method was useful for measuring the oxide film thickness in the nanometer range on aluminum sheets. Copyright © 2004 John Wiley & Sons, Ltd.