| 薄膜型热释电探测器及其薄膜的制备 |
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| 引用本文： | 张秀梅,宋文绪.薄膜型热释电探测器及其薄膜的制备[J].大学物理实验,2009,22(2):27-29. |
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| 作者姓名： | 张秀梅 宋文绪 |
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| 作者单位： | 北华大学,吉林,132013 |
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| 摘 要： | 本文阐述了薄膜型热释电探测器原理及其薄膜的制备方法,进一步分析、整理了薄膜制备过程中的条件及参数。
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| 关 键 词： | 薄膜 热释电 探测器 |
THE THIN FILM PYROELECTRIC DETECTOR AND THE THIN FILM PREPARE |
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| Zhang Xiumei,Song Wenxu.THE THIN FILM PYROELECTRIC DETECTOR AND THE THIN FILM PREPARE[J].Physical Experiment of College,2009,22(2):27-29. |
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| Authors: | Zhang Xiumei Song Wenxu |
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| Institution: | Beihua University;Jilin;132013 |
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| Abstract: | This article elaborated the thin film pyroelectric detector principle and the thin film preparation method,further analyzed,reorganized in the thin film preparation process condition and the parameter. |
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| Keywords: | thin film pyroelectric probe |
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