Structure and optical properties of CVD molybdenum oxide films for electrochromic application |
| |
| Authors: | T Ivanova K Gesheva A Szekeres |
| |
| Institution: | (1) Central Laboratory of Solar Energy and New Energy Sources, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria,;(2) Institute of Solid State Physics, Tzarigradsko Chaussee 72, 1784 Sofia, Bulgaria, |
| |
| Abstract: | Vibrational and optical properties of MoO3 thin films have been studied by Raman and infrared spectroscopy. The films were deposited onto Si substrates at a temperature
of 150 °C by chemical vapor deposition of Mo(CO)6 at atmospheric pressure and different amounts of oxygen in the reactor. The Raman and IR spectral analyses show that the
as-deposited films are in general amorphous. Post-deposition annealing at 300 and 400 °C leads to crystallization and the
MoO3 film structure is a mixture of orthorhombic and monoclinic MoO3 modifications. Transformation of the monoclinic crystallographic modification to a thoroughly orthorhombic layered structure
is observed for films heated at temperatures above 400 °C.
Electronic Publication |
| |
| Keywords: | Chemical vapor deposition Molybdenum oxide Thin films Raman spectroscopy Infrared spectroscopy |
| 本文献已被 SpringerLink 等数据库收录！ |
