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Investigation on the properties of high reflective mirror prepared by ion-beam sputtering
作者姓名:黄建兵  田光磊  邵建达  范正修
作者单位:R&D Center for Optical Thin Film Coatings Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences Shanghai 201800,Graduate School of the Chinese Academy of Sciences,Beijing 100039,R&D Center for Optical Thin Film Coatings Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences Shanghai 201800,Graduate School of the Chinese Academy of Sciences,Beijing 100039,R&D Center for Optical Thin Film Coatings Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences Shanghai 201800,R&D Center for Optical Thin Film Coatings Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences Shanghai 201800
摘    要:The single-sided and dual-sided high reflective mirrors were deposited with ion-beam sputtering (IBS). When the incident light entered with 45°, the reflectance of p-polarized light at 1064 nm exceeded 99.5%. Spectrum was gained by spectrometer and weak absorption of coatings was measured by surface thermal lensing (STL) technique. Laser-induced damage threshold (LIDT) was determined and the damage morphology was observed with Lecia-DMRXE microscope simultaneously. The profile of coatings was measured with Mark III-GPI digital interferometer. It was found that the reflectivity of mirror exceeded 99.9% and its absorption was as low as 14 ppm. The reflective bandwidth of the dual-sided sample was about 43 nm wider than that of single-sided sample, and its LIDT was as high as 28 J/cm2, which was 5 J/cm2 higher than that of single-sided sample. Moreover, the profile of dual-sided sample was better than that of substrate without coatings.

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