| 双腔准分子激光器脉冲充电电源的研究 |
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| 引用本文： | 赵家敏,高健,梁勖,王效顺,游利兵,王庆胜,余吟山,方晓东.双腔准分子激光器脉冲充电电源的研究[J].激光技术,2013,37(1):97-100. |
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| 作者姓名： | 赵家敏 高健 梁勖 王效顺 游利兵 王庆胜 余吟山 方晓东 |
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| 作者单位： | 1.中国科学院安徽光学精密机械研究所, 合肥 230031; |
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| 摘 要： | 为了满足工业用振荡-放大双腔结构的准分子激光器放电激励技术的要求,设计了高重频高精度的脉冲充电电源.该电源采用LC谐振倍压的方式,同时为双腔准分子激光器的充电电容器进行充电,倍压比为1.87.通过对电源工作时序的调节,实现千赫兹高重频放电激励,在电源输出电压约为1300V时,充电电压精度为0.18%.结果表明,通过充电电压精度控制单元,对充电电压反馈调节,可以实现充电电压的高精度.
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| 关 键 词： | 激光技术 充电电源 谐振 高重频 高精度 准分子激光 |
| 收稿时间： | 2012-04-09 |
Study on pulse charge power for a dual-chamber excimer laser |
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| ZHAO Jia-min
,
GAO Jian
,
LIANG Xu
,
WANG Xiao-shun
,
YOU Li-bing
,
WANG Qing-sheng
,
YU Yin-shan
,
FANG Xiao-dong.Study on pulse charge power for a dual-chamber excimer laser[J].Laser Technology,2013,37(1):97-100. |
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| Authors: | ZHAO Jia-min GAO Jian LIANG Xu WANG Xiao-shun YOU Li-bing WANG Qing-sheng YU Yin-shan FANG Xiao-dong |
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| Institution: | 1(1.Anhui Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Hefei 230031,China;2.School of Electronic Science & Applied Physics,Hefei University of Technology,Hefei 230009,China) |
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| Abstract: | In order to satisfy the exciting technique of a master oscillator power amplifier(MOPA) excimer laser for industrial use,a high-repetition and high-accuracy pulse charge power was designed.The power can simultaneously charge the charging capacitors for the dual chamber excimer laser with a LC resonant circuit with a voltage ratio of 1.87.By regulating the work schedule,the power can discharge at kHz level frequency.When the output voltage was about 1300V,the voltage precision was0.18%.The charging voltage can be controlled at high accuracy by the voltage feedback regulation. |
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