Control of the Composition and Structure of Silicon Oxycarbide and Oxynitride Glasses Derived from Polysiloxane Precursors

The reactions involved in the preparation of silicon oxycarbide and oxynitride glasses by pyrolysis of polysiloxane precursors respectively under argon and ammonia are reviewed. The influence of the composition and structure of the precursor and of these pyrolysis reactions on the pyrolysis yield, the composition, and the structure of the glass is discussed. The free-carbon content of the glass depends on the substituents in the precursor and on the nature of the pyrolysis atmosphere. The composition of the oxynitride or the oxycarbide phase depends on the O/Si ratio of the precursor. The structure of these phases is not directly related to the structure of the precursors, but rather depends on their composition and on the pyrolysis temperature.