Study of the physical sputtering of a carbon-ceramic composite by ion bombardment |
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| Authors: | V. S. Avilkina N. N. Andrianova A. M. Borisov Yu. S. Virgiliev E. S. Mashkova V. I. Shulga |
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| Affiliation: | 1.Institute of Nuclear Physics,Moscow State University,Moscow,Russia;2.NIIgraphite,Moscow,Russia |
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| Abstract: | The results of experimental study and computer simulation of SG-P-0.1 carbon-ceramic composite sputtering under 30 keV Ar+ ion irradiation at normal incidence are presented. A comparison with the simulation data shows that taking into account the nanometric wave-like relief well describes an approximately threefold increase in the sputtering yield observed in the experiment in comparison to the smooth surface calculation. |
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