Die sekundäranregung bei der Röntgenfluoreszenzanalyse ebener dünner schichten

The characteristic radiation of thin element films is in certain cases excited by the characteristic radiation of the substrate material, or, on the contrary, the thin film radiation is able to excite the substrate radiation. Based on theoretical considerations a calculation of this effect is given.

For thin film radiation the amount reaches up to 25 per cent of the total intensity and for substrate radiation at maximum 5 per cent.

Thin alloy films show a secondary excitation as well as bulk materials, but the influence is comparably smaller. At film thicknesses of approximately 1000 Å maximum values of 2 per cent of the total intensity have been calculated.