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微型MOEMS阿达玛变换近红外光谱仪
作者姓名:Zhang ZH  Muo XX  Guo YJ  Wang W
作者单位:重庆大学光电技术及系统教育部重点实验室,重庆400044;重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044
基金项目:国家中央高校基本科研业务费
摘    要:提出一种运用微光机电系统(micro-opto-electro-mechanical systems,MOEMS)闪耀光栅,动态产生阿达玛变换模版的微型近红外光谱仪.它具有体积小、价格低、扫描速度快等突出优点.分析了这种新型近红外光谱仪的结构和工作原理,通过对MOEMS闪耀光栅编程,动态生成了 63阶阿达玛模版.实验得...

关 键 词:近红外光谱仪  阿达玛变换  微光机电系统  闪耀光栅

Micro Hadamard transform near-infrared spectrometer
Zhang ZH,Muo XX,Guo YJ,Wang W.Micro Hadamard transform near-infrared spectrometer[J].Spectroscopy and Spectral Analysis,2011,31(7):1975-1979.
Authors:Zhang Zhi-hai  Muo Xiang-xia  Guo Yuan-jun  Wang Wei
Institution:Key Laboratory for Opto-Eletronic Technology and System, Ministry of Education, Chongqing University, Chongqing 400044, China. zzhincq@163.com
Abstract:A new type micro Hadamard transform (HT) near-infrared (NIR) spectrometer is proposed in the present paper. It has a MOEMS (Micro-Opto-Electro-Mechanical Systems) blazed grating HT mask. It has merits of compactness, agility of dynamic mask generation and high scan speed. The structure and theory of this spectrometer are analyzed. The 63-order Hadamard-S matrix and mask are designed. The mask is dynamically generated by program of MOEMS blazed gratings. The spectrum is in agreement with that measured by Shimadzu spectrometer in experiments. It has a wavelength range between 900 and 1 700 nm, spectral resolution of 19 nm, single scan time of 2.4 s, SNR of 44.67:1, optical path of 70 mm x 130 mm, and weight under 1 kg. It can meet the requirement of real time detection and portable application.
Keywords:
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