| 实现Nd:YAG光束匀滑的衍射光学器件的研制 |
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| 引用本文： | 谭峭峰, 袁静, 严瑛白, 等. 实现Nd:YAG光束匀滑的衍射光学器件的研制[J]. 强激光与粒子束, 2001, 13(02). |
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| 作者姓名： | 谭峭峰 袁静 严瑛白 金国藩 徐端颐 |
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| 作者单位： | 1.清华大学 精密测试技术及仪器国家重点实验室,北京 1 00084;;;2.中国工程物理研究院 高温高密度等离子体物理国家重点实验室,四川 绵阳621 900 |
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| 摘 要： | 采用爬山-模拟退火混合优化算法与旋转镂空掩模板工艺，针对基频光与三倍频光，设计并加工出口径80mm的连续位相衍射光学器件。在脉冲工作的Nd：YAG激光器上，实验研究了器件的光束匀滑性能，获得了与设计尺寸相符合、边缘陡峭、但包含较大顶部调制的光斑。初步验证了衍射光学器件在固体激光器光束匀滑上的应用可行性。
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| 关 键 词： | 光束匀滑 衍射光学器件 镂空掩模板 混合优化算法 |
Design,fabrication and experiment of diffractive optical element to realize Nd:YAG laser beam smoothing |
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| tan qiao-feng, yuan jing, yan ying-bai, et al. Design, fabrication and experiment of diffractive optical element to realize Nd:YAG laser beam smoothing[J]. High Power Laser and Particle Beams, 2001, 13. |
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| Authors: | tan qiao-feng yuan jing yan ying-bai jin guo-fan xu duan-yi |
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| Affiliation: | 1. State Key Laboratory of Precision Measurement Technology and Instruments Tsinghua University,Beijing 100084,China;;;2. National Key Laboratory of Laser Fusion,CAEP,P.O.Box 919-988,Mianyang 621900,China |
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| Abstract: | The hybrid algorithm, combing Hill-climbing and Simulated Annealing, and hollowed-out mask are adopted to design and fabricate the diffractive optical element (DOE) with diameter 80mm, to realize beam smoothing for the fundamental wave and the third harmonic wave of Nd:YAG laser. The edge of the DOE is measured by the profilometer, which shows a rather large etching depth error exists. The performance of the DOE is experimentally studied with a pulse-operating Nd:YAG laser. Focused spots have been obtained with the corresponding design size and sharp edge, while a large top modulation exists too. The feasibility of the DOE used in the solid laser beam smoothing is preliminary proved by these firstly obtained experimental results. |
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| Keywords: | beam smoothing diffractive optical element hollowed-out mask hybrid algorithm |
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