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提高光通量的软X射线非周期多层膜的数值模拟
引用本文:柯常军, 王占山, 等. 提高光通量的软X射线非周期多层膜的数值模拟[J]. 强激光与粒子束, 1999, 11(01).
作者姓名:柯常军  王占山  张铁强  曹健林  陈星旦
作者单位:1.吉林工业大学应用物理系, 长春 1 30025;;;2.中国科学院长春光学精密机械研究所应用光学国家重点实验室, 长春1 30022
摘    要:在周期多层膜基础上,采用随机数方法找到适当的非周期膜系, 极大地提高了反射光通量,并给出了整体设计步骤。模拟计算结果表明非周期多层膜能扩展带宽和提高反射率积分值。在12.4~20.1nm波段内,最佳非周期多层膜与峰值在中心波长λ=16.25nm处 的周期多层膜相比,理论积分反射率提高了75%。多个多层膜组成系统的积分强度无明显改善。

关 键 词:非周期多层膜   软X射线   随机数   积分反射率

NUMERICAL SIMULATION OF DISORDER SOFT X RAY MULTILAYER FOR A MAXIMUM INTEGRATED REFLECTIVITY
ke changjun, zhang tieqiang, wang zhanshan, et al. NUMERICAL SIMULATION OF DISORDER SOFT X RAY MULTILAYER FOR A MAXIMUM INTEGRATED REFLECTIVITY[J]. High Power Laser and Particle Beams, 1999, 11.
Authors:ke changjun  zhang tieqiang  wang zhanshan  cao jianlin  chen xingdan
Affiliation:1. Department of Applied Physics,Jilin University of Technology,Changchun 130025;;;2. The State Key Laboratory of Applied Optics,Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Science ,Changchun 130022
Abstract:A random method used for improving light throughput of a soft X ray multilayer mirror has been developed. It is demon strated that layer thickness disorder yields band broadening and increased integrated reflectivity,and achieved 75% increase in integrated reflctivity in the 12.4~20.1nm spectral range with respect to periodic multilayer with its first Bragg peak in the center of that range.
Keywords:disordered multilayer  soft x ray  random number  integrated reflectivity
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