| Design of chirped Mo/Si multilayer mirror in the extreme ultraviolet region |
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| 作者单位： | Institute of Precision Optical Engineering Tongji University Shanghai 200092，Institute of Precision Optical Engineering Tongji University，Shanghai 200092，Institute of Precision Optical Engineering Tongji University，Shanghai 200092 |
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| 摘 要： | The chirped Mo/Si multilayer mirror in the extreme ultraviolet region is designed to obtain sub-femtosecond pulses from high-order harmonics.Numerical simulations of temporal profile of the pulses are made for superposition of incident high-order harmonics and that of reflected ones by the chirped multilayer mirror. The normal incidence reflectivity and chirp in the wavelength range of 12.5-16.5nm are 6.7%±0.5% and-3617±171 as~2,respectively.Simulation results indicate that the designed chirped multilayer mirror can be used for producing 104-as pulses.
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