Thermodynamic analysis of preparation processes for boron-containing films with the use of N-trimethylborazine and hydrogen

The possibilities for using a minimization program for Gibbs energy functions (G _min) in multiphase multicomponent systems are illustrated. The process of chemical vapor deposition in a B-C-N-H-O system at reduced pressure (13.3 Pa) over a wide range of synthesis temperatures (300–1300 K) with the use of an initial gas mixture of N-trimethylborazine and hydrogen is modeled thermodynamically. The possibility of obtaining films of different compositions is shown, and the boundary conditions for the deposition of coatings of the general composition BC _x N _y are determined.