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银纳米线在Si(5512)表面上自组装(英文)
引用本文:张晋,曹祥熙,全武贤,朱永哲,徐载明.银纳米线在Si(5512)表面上自组装(英文)[J].微纳电子技术,2002,39(10):18-22.
作者姓名:张晋  曹祥熙  全武贤  朱永哲  徐载明
作者单位:1. 云南大学物理系,云南,昆明,650091
2. 全北大学物理系,韩国,全州,561-756
摘    要:由于银不会在硅表面与硅形成任何硅化物,银线成为在具有排状结构的Si(5512)表面自组装纳米线的候选材料。本研究试用不同的银覆盖度和退火温度制作高纵横比的银纳米线。当覆盖度为0.1单原子层,先后两次退火温度分别为500℃和600~700℃,经缓慢冷却过程,非常规则的银链优先吸附在Si(5512)面的四聚体上,从而形成高纵横比的银纳米线。这一自组装的两步退火过程可理解为:低温退火使吸附的银原子与Si表面结合;高温退火提供银原子扩散到Si表面四聚体位置的能量。

关 键 词:银纳米线  自组装  Si(5512)  两步退火

Ag nanowires self-assembling on Si (5 5 12) surfaces
ZHANG Jin,CHO Sang-hee,QUAN Wu-xian,ZHU Yong-zhe,SEO Jae-myung.Ag nanowires self-assembling on Si (5 5 12) surfaces[J].Micronanoelectronic Technology,2002,39(10):18-22.
Authors:ZHANG Jin  CHO Sang-hee  QUAN Wu-xian  ZHU Yong-zhe  SEO Jae-myung
Abstract:As Ag can not form any silicide on Si surfaces, Ag wire is a candidate for self-assembled nanowire on row-like Si (5 5 12) -2×1 surfaces. In the present study, various Ag cov-erages and post-annealing temperatures had been tested to fabricate Ag nanowires with high as-pect ratio. When Ag coverage was 0.1 ML and the post-annealing temperature was around 500 ℃,the additional subsequent annealing at 600-700 ℃ and slow-cooling process, the well-ordered Agchains preferentially adsorbed on the tetramer sites, resulting in Ag nanowires with relatively highaspect ratio. It can be understood that, in the double step annealing process, the lower tempera-ture annealing is required for cohesion of adsorbed Ag atoms and the higher temperature anneal-ing is for providing Ag atoms to the tetramer sites.
Keywords:Ag  nanowire  self-assembling  Si (5512)  double step annealing process  
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