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Structure of the Si(011)-(16 × 2) surface and hydrogen desorption kinetics investigated using temperature-programmed desorption |
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| Authors: | H. Kim N. Taylor T. Spila G. Glass S. Y. Park J. E. Greene J. R. Abelson |
| Affiliation: | 1 Materials Science Department, University of Illinois, 1101 West Springfield Avenue, Urbana, IL 61801, USA 2 the Coordinated Science Laboratory, University of Illinois, 1101 West Springfield Avenue, Urbana, IL 61801, USA 3 the Materials Research Laboratory, University of Illinois, 1101 West Springfield Avenue, Urbana, IL 61801, USA |
| Abstract: | D2 temperature-programmed desorption (TPD) was used to probe the structure of the Si(011)-(16 × 2) surface. Deuterium was adsorbed at 200°C to coverages θD ranging up to complete saturation (approximately 1.1 ML) and the sample heated at 5°C s−1. TPD spectra exhibited three second-order desorption peaks labelled β2, β*1 and β1 centered at 430, 520 and 550°C. Of the proposed models for the Si(011)-(16 × 2) reconstruction, the present TPD results as a function of θD provide support for the adatom/dimer model with the β2 peak assigned to D2 desorption from the dihydride phase, while the β*1 and β1 peaks arise from adatom and surface-atom monohydride phases. |
| Keywords: | Adatoms Deuterium Silicon Surface relaxation and reconstruction Thermal desorption spectroscopy |
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