Polymerization of para-xylylene derivatives. VI. morphology of parylene N and parylene C films investigated by gas transport characteristics

Polychloro-p-xylylene (Parylene C) and poly-p-xylylene (Parylene N) films were synthesized in vacuum with and without the presence of 42 mtorr of argon at various deposition temperatures and three different dimer sublimation rates. Depending on the synthesis conditions, the morphology of the films can vary from a homogeneous (nonporous) structure to a heterogeneous (porous) structure. The transport coefficients of the gases He, O₂, N₂, and CO₂ through these films were measured at 25°C. The transport coefficients for both types of films vary with the deposition temperature and the dimer sublimation rate. The variation, however, cannot be solely explained by the change of crystallinity. Anomalous transport behavior is observed in the homogeneous, as-synthesized polymers of relatively high crystalline content (above 20–30%). In many cases the permeabilities and diffusivities increase despite an increase in crystallinity. The effects of crystallization induced by isothermal and solvent annealing on the transport coefficients of polymers of Parylene C are different from those of Parylene N synthesized with or without argon. The mean pore size and effective porosity of the porous films were calculated from gas permeation data. For Parylene C and Parylene N porous films synthesized without argon, increasing the dimer sublimation rate or decreasing the deposition temperature increases the mean pore size but decreases the effective porosity. For Parylene N porous films synthesized in the presence of argon, increasing the dimer sublimation rate or decreasing the deposition temperature results in a decrease in the mean pore size but an increase in the effective porosity. Overall, no appreciable change in transport coefficients is observed upon addition of an inert gas.