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菲涅耳透镜的制作及性能分析(对准误差的影响)
引用本文:李红军,卢振武,廖江红,翁志成.菲涅耳透镜的制作及性能分析(对准误差的影响)[J].光子学报,2001,30(3):325-330.
作者姓名:李红军  卢振武  廖江红  翁志成
作者单位:中国科学院
摘    要:我们使用薄膜沉积法制作16阶菲涅耳透镜,其衍射效率接近87%.用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度.在标量衍射理论的基础上,应用菲涅耳公式和傅里叶变换分析SiO2薄膜和基底的表面反射、对准误差以及入射角对16阶菲涅耳透镜衍射效率的影响.

关 键 词:薄膜沉积  菲涅耳透镜  表面反射  对准误差  入射角  衍射效率
收稿时间:2000-05-29
修稿时间:2000年5月29日

FABRICATION OF FRESNEL LENS AND ANALYSIS OF PERFORMANCE (EFFECT OF ALIGNMENT ERRORS)
Li Hongjun,Lu Zhenwu,Liao Jianghong,Weng Zhicheng.FABRICATION OF FRESNEL LENS AND ANALYSIS OF PERFORMANCE (EFFECT OF ALIGNMENT ERRORS)[J].Acta Photonica Sinica,2001,30(3):325-330.
Authors:Li Hongjun  Lu Zhenwu  Liao Jianghong  Weng Zhicheng
Institution:The State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022
Abstract:The thin film deposition has been used to fabricate 16-step Fresnel lens.Its diffractiveefficiency is approximately 87%.Instead of conventional optical elements,it can perform system′s lightweight,miniaturization and increase degree of freedom in the design.Based on the scalar theory,Fresnel formula and Fourier transform are used to analyze the effects of the surface reflection of SiO2 thin film and substrate,the alignment errors and the angle of incidence of light beam on the diffractive efficiency of 16-step Fresnel lens.
Keywords:Thin film deposition  Fresnel lens  Surface reflection  Alignment errors  Angle of incidence  Diffractive efficiency
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