Microfabrication of FeMnPt films involving magnetic phase change due to structural transformation caused by ion irradiation

Correlations between crystal structures and magnetic properties of Fe_1–xMn_x Pt films were studied. The disordered films with x ≥ 0.44 had paramagnetic properties and the ordered films with x ≥ 0.46 had antiferromagnetic properties, viz. a difference of 0.02 in the x ‐value (i.e., 1.0 at%) was found. At x = 0.44 with the ordered structure, the uniaxial magnetocrystalline anisotropy was about 2.1 × 10⁷ erg cm^–3. A microfabrication process involving the slight composition difference of 0.02, which results in ferromagnetic–paramagnetic phase change due to the structural transformation caused by ion irradiation, was investigated. Only the area irradiated by Mn ions changed from ferromagnetic to paramagnetic phase. (© 2016 WILEY‐VCH Verlag GmbH &Co. KGaA, Weinheim)