The effect of nozzle layout on droplet ejection of a piezo-electrically actuated micro-atomizer |
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Authors: | Yanying Feng Zhaoying Zhou Junhua Zhu Guibin Du |
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Institution: | (1) Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, 100084, China;(2) State Key Laboratory of Transducer Technology, Chinese Academy of Sciences, Beijing, 100080, China |
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Abstract: | We study here effects of nozzle layout on the droplet ejection of a micro atomizer, which was fabricated with the arrayed
nozzles by the MEMS technology and actuated by a piezoelectric disc. A theoretical model was first built for this piezoelectric-liquid-structure
coupling system to characterize the acoustic wave propagation in the liquid chamber, which determined the droplet formation
out of nozzles. The modal analysis was carried out numerically to predict resonant frequencies and simulate the corresponding
pressure wave field. By comparing the amplitude contours of pressure wave on the liquid-solid interface at nozzle inlets with
the designed nozzle layout, behaviors of the device under different vibration modes can be predicted. Experimentally, an impedance
analyzer was used to measure the resonant frequencies of the system. Three types of atomizers with different nozzle layouts
were fabricated for measuring the effect of nozzle distribution on the ejection performance. The visualization experiment
of droplet generation was carried out and volume flow rates of these devices were measured. The good agreement between the
experiment and the prediction proved that only the increase of nozzles may not enhance the droplet generation and a design
of nozzle distribution from a viewpoint of frequency is necessary for a resonant related atomizer.
The project supported by the National Natural Science Foundation of China (50405001). |
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Keywords: | Nozzle layout Fluid-solid coupling Modal analysis Micro atomizer MEMS |
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