Monte Carlo simulation study of reflection electron energy loss spectroscopy of an Fe/Si overlayer sample

Reflection electron energy loss spectroscopy (REELS) has been used to study the optical and electronic properties of semi-infinite solid samples, aided by a theoretical model of the interaction between electrons and a solid. However, REELS has not been used to its full capacity in studying nanomaterial samples because of the difficulty in modeling the electron interaction with a layered nanostructure. In this study, we present a numerical calculation result on the spatially varying inelastic mean free path for a sample comprising an Fe layer of varying thickness on an Si substrate. Furthermore, a Monte Carlo model for electron interaction with this Fe-Si layered structure sample is built based on this inelastic scattering cross section and used to reproduce the REELS spectra of Fe-Si layered structures. The simulated spectra of the sample with varying Fe layer thickness on top of a Si substrate were compared with the experimental spectra. This comparison clearly identifies that the Fe layer remaining on top of the experimental Si substrate after Ar⁺ beam sputtering is in the form of a homogeneous mixed layer, where the Fe/Si interface excitation is absent in the experimental spectra owing to pulverization of the Fe/Si interface during the Ar⁺ sputtering process.