COmparison of Some Basic Plasma Parameters and Discharge Characteristics of Planar Magnetron Sputtering Discharges in Argon and Neon

A comparative investigation is carried out of the discharge characteristics (current-voltage characteristic and dependence of the running voltage on the gas pressure at constant discharge current), as well as of some plasma parameters (electron temperature, floating potential and plasma potential) and densities of the ion current extracted to the substrate, for discharges in neon and argon in a planar magnetron system for sputtering with a graphite target.