Dielectric properties of lead zirconate titanate films synthesized through oxidation of metal layers

Films of the composition Pb(Zr _x Ti_1?x )O₃ are prepared by magnetron sputtering of metal layers onto titanium substrates with subsequent heat treatment in an oxygen atmosphere. The electrical properties of the samples prepared are investigated using impedance spectroscopy in the frequency range from 10² to 5 × 10⁵ Hz at temperatures of 300–750 K. The temperature dependences of the permittivity and the dielectric loss tangent at different frequencies exhibit a behavior typical of ferroelectrics and indicate the occurrence of a ferroelectric phase transition at temperatures close to T = 663 K. Analysis of the imaginary part of the electric modulus has revealed two possible relaxation mechanisms. The activation energy for dc electrical conduction in the paraelectric phase is determined.