| 方块电阻测试中的有限元理论 |
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| 引用本文： | 石俊生,孙以材.方块电阻测试中的有限元理论[J].微纳电子技术,1996(6). |
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| 作者姓名： | 石俊生 孙以材 |
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| 作者单位： | 云南师范大学物理系，河北工业大学电子工程系 |
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| 摘 要： | 介绍了用有限元方法计算半导体方块电阻四探针测试中二维点电流势场的模型并且证明了其正确性。由于有限元方法对边界没有限制，该方法为方块电阻测试中精确确定边界修正系数，更重要的是为微样品测试结构确定提供直接明了的理论依据。
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| 关 键 词： | 方块电阻，四探针，有限元 |
Application of FEM in Measurement of Sheet Resistance |
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| Shi Junsheng.Application of FEM in Measurement of Sheet Resistance[J].Micronanoelectronic Technology,1996(6). |
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| Authors: | Shi Junsheng |
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| Abstract: | A model of calculating electric potential of two dimension point current in measurement of sheet resistance with four-point probe by FEM is presented and its correctness is verified furthe.As it is limitless for FEM in any boundary shapes,it provides the theory basis for finding revised coefficient to boundary accurately,more importantly,for finding microfigures of measurement. |
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| Keywords: | s: Sheet resistance Four-point probe FEM |
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