基于光栅应变传感器的纳米测量机探针设计

为了提高纳米坐标测量机探针的测量精度，且能满足对复杂曲面或微结构进行精确测量的要求，提出了一种新颖的基于微探针系统的光纤布拉格光栅(FBG)探针。该探针具有较高灵敏度和可重复性。提出该新型FBG探针，即探针里有一个熔融的球形顶端，FBG作为应变传感器内置在测杆上。介绍了光纤探针的基本原理，并利用有限元软件ANSYS 11对探针的应变分布在轴向和横向载荷两种典型配置分别进行了仿真分析，结果表明仿真分析和理论计算相吻合。通过实验对光纤探针的灵敏度和分辨率分别进行测试。实验结果表明，在轴向载荷条件下，用位移分辨率为1.5 nm的压电换能器对探针进行性能测试，得到光纤探针的测量分辨率为60 nm。即光纤探针具有较高的灵敏度和分辨率，其性能满足实际测量需要。

Probe design of nanometer measuring machine based on grating strain sensor

In order to improve measuring accuracy of nano coordinate measuring machine probe and meet requirements of accurate measurement for complex surfaces or micro structures, a novel optical fiber Bragg grating (FBG) based micro contact probe system is proposed in this paper. The probe has high sensitivity and repeatability. This new FBG probe has a molten spherical top, and as a strain sensor, FBG is built on the spindle. Basic principle of fiber-optic probe is introduced. The finite element software ANSYS 11 is used to simulate strain distribution of probe in axial and lateral loads. Results show that simulation analysis agrees well with theoretical calculation. Sensitivity and resolution of fiber probe are tested by experiment. Experimental results show that performance of probe is measured by piezoelectric transducer with displacement resolution of 1.5 nm under axial load condition, and measurement resolution of fiber probe is 60 nm. Fiber probe has a high sensitivity and resolution, and its performance can meet requirements of actual measurement.