Room temperature deposition of crystalline indium tin oxide films by cesium-assisted magnetron sputtering |
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Authors: | Deuk Yeon Lee |
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Affiliation: | a Department of Materials Science and Engineering and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, MD 20742, United States b Department of Metallurgical System Engineering, Yonsei University, Sudaemoon ku, Shincheon Dong 134, Seoul 120-749, Republic of Korea |
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Abstract: | Indium tin oxide (ITO) films were deposited on a Si (1 0 0) substrate at room temperature by cesium-assisted magnetron sputtering. Including plasma characteristics, the structural, electrical, and optical properties of deposited films were investigated as a function of cesium partial vapor pressure controlled by cesium reservoir temperature. We calculated the cesium coverage on the target surface showing maximum formation efficiency of negative ions by means of the theoretical model. Cesium addition promotes the formation efficiency of negative ions, which plays important role in enhancing the crystallinity of ITO films. In particular, the plasma density was linearly increased with cesium concentrations. The resultant decrease in specific resistivity and increase in transmittance (82% in the visible region) at optimum cesium concentration (4.24 × 10−4 Ω cm at 80 °C of reservoir temperature) may be due to enhanced crystallinity of ITO films. Excess cesium incorporation into ITO films resulted in amorphization of its microstructure leading to degradation of ITO crystallinity. We discuss the cesium effects based on the growth mechanism of ITO films and the plasma density. |
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Keywords: | Crystalline indium tin oxide Room temperature Cesium-assisted sputtering Formation efficiency of negative ions Plasma density Specific resistivity |
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