Synthesis and characterization of TiO2 nanotubes for humidity sensing |
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| Authors: | Yanyan Zhang Haibin Yang Qi Qi Tong Zhang Guangtian Zou |
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| Institution: | a National Laboratory of Superhard Materials, Jilin University, Changchun 130012, PR China
b State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun 130012, PR China |
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| Abstract: | The highly ordered TiO2 thin films are prepared by anodic oxidation and calcined at 300, 400, 500 and 600 °C, respectively. X-ray diffraction (XRD) and field emission scanning electron microscopy (FESEM) are employed to analyze the structure and the morphology of the TiO2 films. We design a novel sensor to investigate the humidity sensing behaviours of the samples. The samples calcined at 600 °C show high sensitivity with nearly two orders change in the resistance and short response and recovery time (<190 s) during the relative humidity variation from 11 to 95%. |
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| Keywords: | Titania nanotubes Anodization Humidity sensor Thin film Nanostructure |
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