同步辐射压弯准直镜姿态的检测--大曲率半径小口径光斑的波前检测

提出了利用微小楔角剪切干涉仪测量同步辐射压弯准直镜姿态的方法。利用透镜和针孔产生与同步辐射发散度相同的激光束。通过剪切干涉仪．测量经压弯准直镜输出激光束的平行度，可将准直镜的位置、俯仰角度和镜面曲率皆调整到最佳。该剪切干涉仪结构简单，可根据条纹图样判断光束的平行度，每一幅干涉条纹图样与准直镜的一种姿态对应，因而这种方法能确定准直镜表面各点反射X射线的整体效果。该方法适用于测量波前曲率半径大竖直口径小的光束，不但精度高．而且具有实用价值。

Inspection for the Status of Collimating Mirror in Synchrotron Radiation--Wavefront Inspection of Spot with Small Output Width But Long Curvature Radius

A new approach is described to detect the position status of collimating mirror with a shearing interferometer based on micro-wedge. Laser beam having the same divergence as the synchrotron radiation can be created with a lens and a pinhole, and by measuring the parallelism of the laser beam reflected by the collimating mirror with the shearing interferometer, the best status of the collimating mirror about its position, pitch, curvature and bending force can be determined. This interferometry scheme is easily aligned, every interference pattern corresponds with only one status of the collimating mirror. Therefore this approach can determine the whole status of the mirror. The approach is especially fit for measuring the wavefront with small output width but long curvature radius, and not only has high accuracy but also is valuable in practice.