Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution |
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Authors: | Brewer Courtney A Brizuela Fernando Wachulak Przemyslaw Martz Dale H Chao Weilun Anderson Erik H Attwood David T Vinogradov Alexander V Artyukov Igor A Ponomareko Alexander G Kondratenko Valeriy V Marconi Mario C Rocca Jorge J Menoni Carmen S |
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Institution: | National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, Fort Collins, CO 80523, USA. brewerca@engr.colostate.edu |
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Abstract: | We have demonstrated near-wavelength resolution microscopy in the extreme ultraviolet. Images of 50 nm diameter nanotubes were obtained with a single ~1 ns duration pulse from a desktop-size 46.9 nm laser. We measured the modulation transfer function of the microscope for three different numerical aperture zone plate objectives, demonstrating that 54 nm half-period structures can be resolved. The combination of near-wavelength spatial resolution and high temporal resolution opens myriad opportunities in imaging, such as the ability to directly investigate dynamics of nanoscale structures. |
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