硅基PZT压电驱动微开关的设计和优化

采用压电多层微悬臂梁理论分析模型，研究了一种新型PZT压电复合多层膜微悬臂梁驱动微开关的机械性能，提出了一种新的硅基PZT压电复合多层薄膜微悬臂梁驱动微开关的制作方法。利用有限元分析软件ANSYS7.O对微悬臂梁结构进行了模态分析，探讨了结构参数与微悬臂梁运动特性的关系及影响压电薄膜微开关性能的因素，进一步模拟了0．3V工作电压下微开关的位移。结果表明，经优化后的压电薄膜微开关可进一步应用到集成化芯片系统中。

Design and Optimization of Micro-switch Actuated by PZT Piezoelectric Cantilever Based on Si

The mechanical performance of a novel micro-switch actuated by PZT piezoelectric multiple-layer cantilever is studied with piezoelectric multiple-layer cantilever analysis model, and a new fabrication process of th emicro-switch actuated by PZT piezoelectric multiple-layer cantilever based on $i is presented. By using software of finite element ANSYS7.0, the analyses on modal shapes of micro-cantilever structure are carried out. The relationship between structure parameters and the movement performance and some factors that may have an effect on the performance of this micro-switch are discussed. Furthermore the displacement of micro-switch applied directcurrent working voltage of 0.3 volts is simulated. The results demonstrate that the micro-switch optimized can be applied to system on chip.