Quantitative measurement of Φ630 mm F/1.34 parabolic surfaces with Ronchi grating test method |
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作者姓名: | 雷柏平 伍凡 周晨波 |
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作者单位: | Baiping Lei(Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China;Graduate University of Chinese Academy of Sciences, Beijing 100049, China);Fan Wu(Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China);Chenbo Zhou(Institute of Science and Technology for Optoelectronic Information,Yantai University, Yantai 264005, China) |
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摘 要: | The Ronchi grating is applied to measure the large-aperture aspheric surfaces in a quantitative way on the basis of self-made software which includes Ronchi null grating design, collection of Ronchi graph, and data processing. The measured concave parabolic mirror has a diameter of 630 mm and an F number of 1.34. The measurement result is approximately the same as that of the ZYGO interferometer. This analysis software and test method establish a good foundation for the quantitative measurement of the big error about the large-aperture aspheric surfaces of the next generation telescope.
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关 键 词: | 光栅设计 测试方法 定量测定 表面 大口径非球面 测量误差 抛物面反射镜 定量方法 |
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