Monte Carlo calculations of electron scattering in solids for nuclear spectroscopy

Direct MC modelling of individual elastic and inelastic scattering events of electrons in solids is described. The examples cover transmission through thin solid layers as well as backscattering from flat surfaces of bulk solids. Divergent beams and isotropic emission of incident electrons with energies from 5 to 200 keV are treated.Presented at the Seminar on Secondary Electrons in Electron Spectroscopy, Microscopy, and Microanalysis, Chlum (The Czech Republic), 21–24 September, 1993.