Institution: | (1) Laboratory of Optical Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk, 630090, Russia;(2) Technical Centre, Institute of Semiconductor Physics, SB RAS, Novosibirsk, 630090, Russia;(3) Innovation Department, Institute of Geology and Mineralogy, SB RAS, Novosibirsk, 630090, Russia;(4) Laboratory of Electron Microscopy and Submicron Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk, 630090, Russia |