Features of the structure of TiN films after irradiation with nitrogen |
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| Authors: | A. Z. Khamdokhov R. Sh. Teshev Z. M. Khamdokhov V. S. Kulikauskas P. N. Chernykh |
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| Affiliation: | 1. Kabardino-Balkarian State University, Nalchik, Russia
2. Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia
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| Abstract: | In this work, we study the structure of submicron titanium-nitride films after surface treatment with a nitrogen-ion beam. It is ascertained that nitrogen-ion beams affect two-phase TiN-Ti films thus transforming them into single-phase TiN. |
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