Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching |
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| Authors: | I. G. Zabrodin B. A. Zakalov I. A. Kas’kov A. E. Pestov N. N. Salashchenko N. I. Chkhalo |
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| Affiliation: | 1. Institute for the Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, GSP-105, 603950, Russia
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| Abstract: | A device for the precise shape correction of optical surfaces of any irregular shape (convex, concave) up to 300 mm in diameter by means of ion-beam and reactive plasma etching is described. The possibilities of the device allow the fabrication of optical elements with a root-mean-square deviation from the desired shape on the level of 0.3 to 1.0 nm. |
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