| 直角坐标和极坐标系一体的激光直写设备 |
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| 引用本文： | 李凤友,卢振武,谢永军,张殿文.直角坐标和极坐标系一体的激光直写设备[J].光子学报,2002,31(5):616-619. |
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| 作者姓名： | 李凤友 卢振武 谢永军 张殿文 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所,应用光学国家重点实验室,吉林,长春,130022 |
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| 基金项目： | National Natural Science Foundation (60078006) |
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| 摘 要： | 介绍了具有直角坐标和极坐标写入系统的激光直写设备,给出了该设备制作衍射光学元件的光刻特点.
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| 关 键 词： | 激光直写 衍射光学元件 计算全息图和光刻 |
| 收稿时间： | 2001/8/27 |
| 修稿时间： | 2001年8月27日 |
LASER DIRECT WRITING SYSTEM WITH CARTESIAN AND POLAR COORDINATE |
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| Li Fengyou,Lu Zhenwu,Xie Yongjun,Zhang Dianwen State Key Lab of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun ,China.LASER DIRECT WRITING SYSTEM WITH CARTESIAN AND POLAR COORDINATE[J].Acta Photonica Sinica,2002,31(5):616-619. |
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| Authors: | Li Fengyou Lu Zhenwu Xie Yongjun Zhang Dianwen State Key Lab of Applied Optics Changchun Institute of Optics Fine Mechanics and Physics Chinese Academy of Science Changchun China |
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| Institution: | Li Fengyou,Lu Zhenwu,Xie Yongjun,Zhang Dianwen State Key Lab of Applied Optics,Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Science,Changchun 130022,China |
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| Abstract: | Laser Direct Writing System(LDWS),which is mainly composed of Cartesian and polar coordinate systems,is introduced here and its photolithographic characteristics for fabricating the diffractive optical elements (DOE′s) are presented.The fabrication techniques by applying the laser direct writing are developed.Experimental results have been obtained by using LDWS. |
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| Keywords: | LDWS DOE CGH Photolithography |
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