Impurity effects on the laser-induced crystallization of thin amorphous silicon film on glass substrate |
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Authors: | Pilkyu Kim Seung-Jae Moon Sungho Jeong |
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Institution: | (1) Institute of Electro-Optical Engineering, Tatung University, Taipei, 104, Taiwan, ROC;(2) AU Optronics Corporation, Hsinchu, 300, Taiwan, ROC |
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Abstract: | Crystallization of 100 nm thick amorphous silicon (a-Si) films deposited on glass substrates was carried out using a dual-green-laser method. Depending on a-Si deposition method, either low-pressure chemical vapor deposition (LPCVD) or plasma-enhanced chemical vapor deposition (PECVD),
the density of impurities such as Al, K, and Na within the a-Si thin films significantly varied. For the high impurity case of LPCVD, grains of 200–300 nm in size were obtained, whereas
for the PECVD case a maximum grain size of about 4 μm was achieved, satisfying the requirements for applications in commercial
TFT devices. These results confirm that for the use of glass substrates in polycrystallization of a-Si, controlling the impurity density during substrate preparation is critical. |
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