微型石英敏感平板玻璃零件参数的激光视觉测量研究

高精度、快速非接触的平板玻璃零件的几何参数测量，已成为相关生产领域的主要问题，也是激光光谱学的一个重要应用方向。平板玻璃零件几何参数的准确检测不仅有助于加工工艺的改进和产品装配精度的提高，还可以实现按参数分档管理。为实现微型石英敏感平板玻璃零件参数的精密测量，提出了一种基于激光与视觉图像处理技术的多参数测量方法，设计了由自适应同轴视觉检测单元和激光视觉厚度测量单元构成的测试系统。为了保证其中的半导体激光器LD(laser diode)能提供稳定的光源，设计了一种恒功率驱动控制系统。在亚像素图像处理中给出了改进的亚像素边缘定位算法，实现了二次曲线特征边缘亚像素精确定位。利用检测出的曲线边缘点数据，通过定义一个新的误差函数并最小化，可以计算出微型石英敏感平板玻璃零件参数，从而实现图像特征参数的精确提取。在实验室条件下进行微型石英敏感平板玻璃零件几何参数的检测试验，测量结果的平均偏差优于2 μm。该方法稳定性好，测量精度高，满足微型石英敏感平板玻璃零件参数检测的精度要求。

Laser and Vision Measurement Research on Parameters of Miniature Quartz Plate-Sensitive Glass Part

High-precision, rapid and non-contact geometry parameter measurements of plate glass parts has become a main problem in the field of testing-related production and processing and also an important applied direction for laser spectroscopy. Accurately detect the geometric parameters of plate glass parts can not only improve the processing technology and the precision of assembly, but also bring about sub-file management according to the parameters. This paper presents a novel multi-parameter measurement method based on the laser and vision image processing technology, which can be used to measure parameters of miniature quartz plate-sensitive glass part accurately. The testing system consisting of self-adaption coaxial visual detection unit and laser vision thickness inspection unit was designed. A constant power drive control system was set up to ensure the laser diode (LD) can provide a stable light source for the testing system. A modified sub-pixel edge position algorithm of conic features was proposed to implement the sub-pixel image processing, and the parameters can be extracted. According to the data detected from curve edge points and a new-defined error function, which was minimized, the parameters of miniature quartz plate-sensitive glass part can be calculated. The experiments show that the average deviation of the measurement results is less than 2 μm, and the method has good stability and high accuracy measurement, which can meet the precision requirement of parameter measurement for miniature plate glass part.