Electron extraction through an objective lens |
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| Authors: | O D Potapkin A A Mel’nikov |
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| Institution: | (1) Moscow State Institute of Radio Engineering, Electronics, and Automation, pr. Vernadskogo 78, Moscow, 119454, Russia |
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| Abstract: | The laws of electron motion in the field of a combined lens (composed of an electrostatic and magnetic lenses, as in a low-voltage scanning electron microscope) are considered. The character of the secondary- and backscattered-electron trajectories in the collimator field is analyzed taking into account the generalized electron momentum. |
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