Mode transition in magnetic pole enhanced inductively coupled argon plasmas |
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Authors: | F Jan A W Khan A Saeed M Zakaullah |
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Institution: | 1.Department of Physics,Quaid-i-Azam University,Islamabad,Pakistan;2.National Centre for Physics,Quaid-i-Azam University Campus,Islamabad,Pakistan |
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Abstract: | The electrical probe (Langmuir probe) diagnostics of different plasma parameters and operation regimes (E/H modes) of magnetic
pole enhanced, inductively coupled (MaPE-ICP) argon plasmas are investigated. It is shown that uniform, high density (n
e
∼ 1012 cm-3) and low electron temperature (T
e
∼ 1.5 eV) plasma can be produced in low pressure argon discharges at a low power (100 W). It is found that an MaPE-ICP reactor
operates in two different modes; capacitive (E mode) and inductive (H mode). No density jump or hysteresis are reported between
these modes. The effect of pressure on transition power, where the mode changes from E to H mode at 20 sccm gas flow rate
are studied and it is found that for all pressures tested (∼7.5 mTorr to 75 mTorr) the transition power remains same. In the
inductive mode, the above plasma parameters show a smooth variation with increasing filling gas pressure at fixed power. The
intensity of the emission line at 750.4 nm due to 2p
1 → 1s
2 (Paschen’s notation) transition, closely follows the variation of n
e
with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation
mostly changes in the high-energy tail, which enlightens close similarity of the 750.4 nm argon line to electron number density
(n
e
). The behaviour of the electron energy probability function (EEPF) with regard to pressure and RF power in two operational
modes is presented. |
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Keywords: | |
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