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GDP/D-GDP化学结构与力学性能的研究
引用本文:刘浩,何智兵,韦建军,贾晓琴,张玲,刘艳松,周强.GDP/D-GDP化学结构与力学性能的研究[J].强激光与粒子束,2015,27(3):032028-235.
作者姓名:刘浩  何智兵  韦建军  贾晓琴  张玲  刘艳松  周强
作者单位:1.中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621 900;
基金项目:国家自然科学基金青年科学基金项目
摘    要:利用低压等离子体增强化学气相沉积技术制备碳氢辉光放电聚合物(GDP)和全氘代辉光放电聚合物(D-GDP)薄膜。利用表面轮廓仪、傅里叶红外光谱仪和纳米压痕技术对制备的样品进行表征,讨论了GDP/D-GDP薄膜的沉积速率、化学结构和力学性能在ICF物理实验用靶应用中的优缺点。结果表明:GDP/D-GDP薄膜的沉积速率都随反应气体流量比例近线性增加,GDP的沉积速率达到2.6μm,D-GDP的沉积速率达到1μm,GDP的沉积速率远大于D-GDP的沉积速率;D-GDP薄膜内部的交联化程度较弱,D-GDP更有利于靶丸内燃料的红外均化;GDP的力学性能明显优于D-GDP,更有利于ICF物理实验用靶的燃料填充与装配操作。

关 键 词:辉光放电聚合物    沉积速率    红外均化    力学性能
收稿时间:2014-08-27

Chemical structure and mechanical properties of glow discharge polymer films and deuterated glow discharge polymer films
Liu Hao;He Zhibing;Wei Jianjun;Jia Xiaoqin;Zhang Ling;Liu Yansong;Zhou Qiang.Chemical structure and mechanical properties of glow discharge polymer films and deuterated glow discharge polymer films[J].High Power Laser and Particle Beams,2015,27(3):032028-235.
Authors:Liu Hao;He Zhibing;Wei Jianjun;Jia Xiaoqin;Zhang Ling;Liu Yansong;Zhou Qiang
Institution:1.Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang 621900,China;2.Institute of Atomic and Molecular Physics,Sichuan University,Chengdu 610065,China;3.Process Department of DEC Dongfang Electric Machinery Co Ltd,Deyang 618000,China
Abstract:Taking advantage of low pressure plasma chemical vapor deposition technology, the hydrocarbon glow discharge polymer (GDP) and deuterated glow discharge polymer (D-GDP) films were fabricated by glow discharge polymerization technology. The deposition rates, the chemical structures and mechanical properties of films were studied by FTIR spectra, surface profiler and nano-indentation. The results show that the deposition rate of GDP/D-GDP almost linearly increases with the increase of gas flow, the deposition rate of GDP films is higher than that of D-GDP films. The cross-link degree of D-GDP films is lower than that in GDP films. The D-GDP films might be more favorable for IR heating on the DT ice of ICF target. The mechanical property of GDP is better than that of D-GDP.
Keywords:
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