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PIC simulations of capacitively coupled oxygen rf discharges |
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| Authors: | Paul Matthias Gunnar Bandelow Konstantin Matyash Julia Duras Philipp Hacker Daniel Kahnfeld Stefan Kemnitz Lars Lewerentz Karl F. Lüskow Jürgen Meichsner Ralf Schneider |
| Affiliation: | 1.Institute of Physics, Ernst-Moritz-Arndt-University Greifswald,Greifswald,Germany;2.Nuremberg Institute of Technology,Nuremberg,Germany;3.Institute of Computer Science and Technology, University Rostock,Rostock,Germany |
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