|
|||||
|
|
Sensitivity limitations in the analysis of semiconductor devices with auger electron spectrometry (AES) and secondary ion mass spectrometry (SIMS) |
|
| Authors: | R. v. Criegern Th. Hillmer I. Weitzel |
| Affiliation: | 1. Zentrale Forschung und Entwicklung, Siemens AG, Otto-Hahn-Ring 6, D-8000, München 83, Federal Republic of Germany |
| Abstract: | |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |