单晶蓝宝石球罩的磁控研磨试验研究

开展了金刚石磁性磨料在磁场控制下研磨加工单晶蓝宝石球罩的实验,研究了研磨压力、研磨时间、乙二胺浓度等因素对单晶蓝宝石球罩材料去除率及面粗糙度的影响.实验结果表明:随着研磨压力的增大,材料去除率增加但增幅减小,面粗糙度Sa也降低,降低幅度也减小.当乙二胺浓度为3;,研磨压力为25 kPa时,材料去除率在前30 min能保持在5μm·h-1以上,但在30 min之后,材料去除率开始出现较大幅度的下降,面粗糙度Sa在前30 min较为快速地降低到110 nm左右,后30 min略有降低.

Experimental Study on the Lapping of Single Crystal Sapphire Dome Using Magnetic Abrasive Finishing

The lapping experiment of single crystal sapphire dome using micro-diamond magnetic abrasive under the control of magnetic field was studied .The effects of lapping pressure , lapping time and ethylenediamine concentration on the removal rate and surface roughness of single crystal sapphire dome were studied systematically .The experimental results show that with the increase of lapping pressure , the removal rate increases but the increase is reduced and the surface roughness decreases but the decrease is reduced.When the concentration of ethylenediamine was 3;and pressure was 25 kPa, the removal rate in the first 30 min can remain above 5 μm· h -1 , but after 30 min, the removal rate began to appear a significant decline .Surface roughness in the first 30 min was reduced to about 110 nm quickly , slightly lower after 30 min.